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Porous Ceramic

aeroFIX

Novel Vacuum Adsorption
Porous Ceramic Adsorption stage
Utilizing our exclusive sintering aid and distinctive fully sintered technology, aeroFIX precisely controls a porous structure featuring uniformly distributed micron level pores. By designing custom solutions tailored to specific process needs based on a various pore sizes and a porosity exceeding 40%, we guarantee a particle, dust-free manufacturing environment. Consequently, ‘aeroFIX’ enhances the efficiency of high precision manufacturing processes through uniform vacuum adsorption without surface deformation and advanced non-contact floating technology.

5 Advantages driven by Nanotem Korea’s proprietary materials and sintering technology

Partial Adsorption Available

Cost reduction

Operational efficiency improvement

Compatible with wet environments.

부분흡착
  • A single unit accommodates various workpiece sizes
  • Eliminates the need to change vacuum chucks based on workpiece type or size
  • Achieves cost savings and enhances work efficiency
High-Performance, High-Precision Uniform Adsorption

Cost reduction

Operational efficiency improvement

Existing metal hole type vacuum chuck
aeroFIX porous ceramic vacuum chuck
Aerofix Porous ceramic
  • Ideal for sensitive workpieces, such as thin films
  • Unlike conventional hole-type aluminum or metal vacuum chucks, this solution eliminates adsorption marks, sagging, warping, and curling on the workpiece
Non-Contact Floating Conveyance

Enhances operational efficiency

Resolves contamination issues

표면저항대응
  • Maximize process efficiency with non-contact floating and high speed transfer.
  • Prevents risks of contamination and scratches on the workpiece
Anti-Static Effects

Permanent anti-static functionality

Resolves contamination issues

정전기대응
  • ESD (Electrostatic Discharge) compliant
  • Excellent static dissipation properties make it ideal as an anti-static material
  • Stable static elimination performance prevents electrical damage to the workpiece(Inherent surface resistivity)
Versatile Shapes and Sizes

Make To Order

  • Fully customizable, ranging from micro-sized pads to ultra-large 8.6G+ generation sizes and roll-type shapes.

기존 장치에 올려만 놓아도 OK

간단한

비용절감

  • 현재 사용하고 있는 진공척 위에 올려만 놓아도
     기능을 발휘
  • 별도 체결 불필요
Porous Ceramic Stages
다공질 세라믹 포켓타입
Pocket Type
다공질 세라믹 롤타입
Roll Type
다공질 세라믹 2층구조
2-story Structure
다공질 세라믹 웨이퍼척
Wafer Chuck
다공질 세라믹 백색 세라믹 척
White Ceramic Chuck
다공질 세라믹 대기공 세라믹 척
Large Pore Ceramic Chuck
다공질 세라믹 다공질 그리퍼
Porous Gripper
다공질 세라믹 경량 웨이퍼 척
Lightweight Wafer Chuck

Application Field

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High Precision
Inspection Equipment

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Precision Process Equipment for Laminating & Coating
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Precision Process
Equipment for Scribing
& Laser

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Transfer & Non-Contact
Air Floating Conveyance Systems

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Non-Contact
Roll-to-Roll Transfer Units

  • High Precision Inspection Equipment : OLED,HBM(AOI) / Glass substrates (TTV,TGV) / Secondary batteries(thickness,surface)
  • Precision Process Equipment for Laminating & Coating : Display, Packaging semiconductor , Glass substrates, Secondary batteries
  • Precision Process Equipment for Scribing & Laser : Glass substrates , Wafer, Ceramic, Process for next-gen materials
  • High Precision Laser Processing Equipment : Laser Lift-Off (LLO) / Laser Cutting / High-Precision Laser Focus Maintenance
  • Through-Silicon Via (TSV) & Through-Glass Via (TGV) Substrates
  • Non-Contact Air-Floating Conveyance Systems : Achieves high-speed, high-precision transfer for sensitive workpieces, including large glass substrates, thin films, and wafers
  • Non-Contact Roll-to-Roll Transfer Units : Optimized for continuous production lines, including high-functional films, secondary batteries (EV batteries), and flexible displays